5/10/2012	8:41:05 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/10/2012	8:41:06 AM	Recipe started at 8:41 AM
5/10/2012	8:41:06 AM	Helium valve closed
5/10/2012	8:41:06 AM	H2 valve closed
5/10/2012	8:41:06 AM	BCl3 valve closed
5/10/2012	8:41:06 AM	PH3 valve closed
5/10/2012	8:41:06 AM	SiCl4 pre valve closed
5/10/2012	8:41:06 AM	SiCl4 post valve closed
5/10/2012	8:41:06 AM	Main Vac valve closed
5/10/2012	8:41:06 AM	Bypass valve closed
5/10/2012	8:41:06 AM	Bubbler valve closed
5/10/2012	8:41:06 AM	Helium MFC set to  0.000000
5/10/2012	8:41:06 AM	H2 MFC set to  0.000000
5/10/2012	8:41:06 AM	BCl3 MFC set to  0.000000
5/10/2012	8:41:06 AM	PH3 MFC set to  0.000000
5/10/2012	8:41:06 AM	SiCl4 MFC set to  0.000000
5/10/2012	8:41:06 AM	Bypass solenoid MFC set to  0.000000
5/10/2012	8:41:06 AM	Tube furnace set to 0
5/10/2012	8:41:09 AM	H2 valve closed
5/10/2012	8:41:09 AM	BCl3 valve closed
5/10/2012	8:41:09 AM	PH3 valve closed
5/10/2012	8:41:09 AM	SiCl4 pre valve closed
5/10/2012	8:41:09 AM	SiCl4 post valve closed
5/10/2012	8:41:09 AM	Main Vac valve closed
5/10/2012	8:41:09 AM	Bypass valve closed
5/10/2012	8:41:09 AM	Bubbler valve closed
5/10/2012	8:41:09 AM	Helium valve opened
5/10/2012	8:41:09 AM	Helium MFC set to  500.000000
5/10/2012	8:41:09 AM	H2 MFC set to  0.000000
5/10/2012	8:41:09 AM	BCl3 MFC set to  0.000000
5/10/2012	8:41:09 AM	PH3 MFC set to  0.000000
5/10/2012	8:41:09 AM	SiCl4 MFC set to  0.000000
5/10/2012	8:41:09 AM	Bypass solenoid MFC set to  0.000000
5/10/2012	8:41:09 AM	Tube furnace set to 0
5/10/2012	8:42:22 AM	Helium valve closed
5/10/2012	8:42:22 AM	H2 valve closed
5/10/2012	8:42:22 AM	BCl3 valve closed
5/10/2012	8:42:22 AM	PH3 valve closed
5/10/2012	8:42:22 AM	SiCl4 pre valve closed
5/10/2012	8:42:22 AM	SiCl4 post valve closed
5/10/2012	8:42:22 AM	Main Vac valve closed
5/10/2012	8:42:23 AM	Bypass valve closed
5/10/2012	8:42:23 AM	Bubbler valve closed
5/10/2012	8:42:23 AM	Helium MFC set to  0.000000
5/10/2012	8:42:23 AM	H2 MFC set to  0.000000
5/10/2012	8:42:23 AM	BCl3 MFC set to  0.000000
5/10/2012	8:42:23 AM	PH3 MFC set to  0.000000
5/10/2012	8:42:23 AM	SiCl4 MFC set to  0.000000
5/10/2012	8:42:23 AM	Bypass solenoid MFC set to  0.000000
5/10/2012	8:42:23 AM	Tube furnace set to 0
5/10/2012	8:42:24 AM	Run finished at 8:42 AM
5/10/2012	8:42:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/10/2012	8:49:24 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/10/2012	8:49:25 AM	Recipe started at 8:49 AM
5/10/2012	8:49:25 AM	Helium valve closed
5/10/2012	8:49:25 AM	H2 valve closed
5/10/2012	8:49:25 AM	BCl3 valve closed
5/10/2012	8:49:25 AM	PH3 valve closed
5/10/2012	8:49:25 AM	SiCl4 pre valve closed
5/10/2012	8:49:25 AM	SiCl4 post valve closed
5/10/2012	8:49:25 AM	Main Vac valve closed
5/10/2012	8:49:25 AM	Bubbler valve closed
5/10/2012	8:49:25 AM	Bypass valve opened
5/10/2012	8:49:25 AM	Helium MFC set to  0.000000
5/10/2012	8:49:25 AM	H2 MFC set to  0.000000
5/10/2012	8:49:25 AM	BCl3 MFC set to  0.000000
5/10/2012	8:49:25 AM	PH3 MFC set to  0.000000
5/10/2012	8:49:25 AM	SiCl4 MFC set to  0.000000
5/10/2012	8:49:25 AM	Bypass solenoid MFC set to  0.000000
5/10/2012	8:49:25 AM	Tube furnace set to 0
5/10/2012	8:50:37 AM	Helium valve closed
5/10/2012	8:50:37 AM	H2 valve closed
5/10/2012	8:50:37 AM	BCl3 valve closed
5/10/2012	8:50:37 AM	PH3 valve closed
5/10/2012	8:50:37 AM	SiCl4 pre valve closed
5/10/2012	8:50:37 AM	SiCl4 post valve closed
5/10/2012	8:50:37 AM	Main Vac valve closed
5/10/2012	8:50:37 AM	Bubbler valve closed
5/10/2012	8:50:37 AM	Bypass valve opened
5/10/2012	8:50:37 AM	Helium MFC set to  0.000000
5/10/2012	8:50:37 AM	H2 MFC set to  0.000000
5/10/2012	8:50:37 AM	BCl3 MFC set to  0.000000
5/10/2012	8:50:37 AM	PH3 MFC set to  0.000000
5/10/2012	8:50:37 AM	SiCl4 MFC set to  0.000000
5/10/2012	8:50:37 AM	Bypass solenoid MFC set to  0.000000
5/10/2012	8:50:37 AM	Tube furnace set to 0
5/10/2012	8:51:37 AM	Helium valve closed
5/10/2012	8:51:37 AM	H2 valve closed
5/10/2012	8:51:37 AM	BCl3 valve closed
5/10/2012	8:51:37 AM	PH3 valve closed
5/10/2012	8:51:37 AM	SiCl4 pre valve closed
5/10/2012	8:51:37 AM	SiCl4 post valve closed
5/10/2012	8:51:37 AM	Bypass valve closed
5/10/2012	8:51:37 AM	Bubbler valve closed
5/10/2012	8:51:37 AM	Main Vac valve opened
5/10/2012	8:51:37 AM	Helium MFC set to  0.000000
5/10/2012	8:51:37 AM	H2 MFC set to  0.000000
5/10/2012	8:51:37 AM	BCl3 MFC set to  0.000000
5/10/2012	8:51:37 AM	PH3 MFC set to  0.000000
5/10/2012	8:51:37 AM	SiCl4 MFC set to  0.000000
5/10/2012	8:51:37 AM	Bypass solenoid MFC set to  0.000000
5/10/2012	8:51:37 AM	Tube furnace set to 0
5/10/2012	8:51:38 AM	Run finished at 8:51 AM
5/10/2012	8:51:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
